METHOD AND APPARATUS FOR MEASURING SHAPE AND THICKNESS VARIATION OF A WAFER
- Application ID: EP13738353
- Status: █ APPLICATION WITHDRAWN
This EP application has the IPC class G01 (MEASURING; TESTING). F. R. Kelly & Co. is specialized in G01. F. R. Kelly & Co. is specialised in G01 (MEASURING; TESTING). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 19.01.2012 - Priority Date (US 201261588561P)
- 25.07.2013 - Publication A1 (WO2013109733)
- 03.12.2014 - Publication A1 (EP2807451)