Priority Date: 20.06.12 (DE 201210105369)

MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE

  • Application ID: EP13732411
  • Status: PATENT GRANTED

Attorney

Employment test 51 - 200 employees
Company dna epping hermann fischer patentanwaltsgesellschaft mbh
operating since 1999
Headquarter in Munich and 1 office
active in Legal Services, IP Consulting, and IP Portfolio Processing

Specialization

This EP application has the IPC class G02 (OPTICS) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING). We found, that Bonsmann Bonsmann Frank, Adolf Lüken Höflich Sawodny, Patentanwalt Dipl.-Ing. Ralf Christian Bucher, Cabinet Weinstein, Friese Goeden Patentanwälte PartGmbB are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 20.06.2012 - Priority Date (DE 201210105369)
  • 27.12.2013 - Publication A1 (WO2013190005)
  • 29.04.2015 - Publication A1 (EP2864825)
  • 14.09.2016 - Publication B1 (EP2864825)

IPC Classification