MULTILAYER MIRROR FOR THE EUV SPECTRAL RANGE
- Application ID: EP13732411
- Status: █ PATENT GRANTED
This patent has the IPC combination G02 (OPTICS) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) is specialized in the combination G02 and G21. We found, that Bonsmann Bonsmann Frank, Adolf Lüken Höflich Sawodny, Patentanwalt Dipl.-Ing. Ralf Christian Bucher, Cabinet Weinstein are specialized in all of these IPC classes. For a similar patent, they might be a good choice.