Priority Date: 12.06.12 (DE 201210105036)

METHOD FOR PRODUCING A MICROSYSTEM HAVING A THIN FILM MADE OF LEAD ZIRCONATE TITANATE

  • Application ID: EP13728730
  • Status: EXAMINATION IN PROGRESS

Attorney

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Specialization

This patent has the IPC combination C23, G01, and H01 is specialized in the combination C23, G01, and H01. We found, that Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG, Cremer & Cremer and 8 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 12.06.2012 - Priority Date (DE 201210105036)
  • 19.12.2013 - Publication A1 (WO2013186260)
  • 15.04.2015 - Publication A1 (EP2859130)