Priority Date: 12.06.12 (DE 201210209837)

EUV EXCITATION LIGHT SOURCE WITH A LASER BEAM SOURCE AND A BEAM GUIDING DEVICE FOR MANIPULATING THE LASER BEAM

  • Application ID: EP13726746
  • Status: PATENT GRANTED

Applicant

Attorney

Employment test 51 - 200 employees
Company dna prufer and partner gbr
operating since 1972
Headquarter in Munich
active in Legal Services and IP Consulting

Specialization

This patent has the IPC class H05 (ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR) is specialized in H05. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 12.06.2012 - Priority Date (DE 201210209837)
  • 19.12.2013 - Publication A1 (WO2013186052)
  • 15.04.2015 - Publication A1 (EP2859783)
  • 17.05.2017 - Publication B1 (EP2859783)

IPC Classification