AN ASSEMBLY FOR MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS, A LITHOGRAPHY APPARATUS, A METHOD OF MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS AND A DEVICE MANUFACTURING METHOD
- Application ID: EP13720415
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class G02, G03, and H01. We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Weser & Kollegen, Office Kirkpatrick S.A. and 3 others are specialized in this combination either. For a similar patent, they might be a good choice.