Priority Date: 01.06.12 (US 201261654575P)

AN ASSEMBLY FOR MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS, A LITHOGRAPHY APPARATUS, A METHOD OF MODIFYING PROPERTIES OF A PLURALITY OF RADIATION BEAMS AND A DEVICE MANUFACTURING METHOD

  • Application ID: EP13720415
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorney

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Specialization

This EP application has the IPC class G02, G03, and H01. We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Weser & Kollegen, Office Kirkpatrick S.A. and 3 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 01.06.2012 - Priority Date (US 201261654575P)
  • 05.12.2013 - Publication A1 (WO2013178429)
  • 08.04.2015 - Publication A1 (EP2856260)

IPC Classification