Priority Date: 24.08.12 (US 201261693032P)

APPARATUS FOR CYLINDRICAL MAGNETRON SPUTTERING

  • Application ID: EP13710953
  • Status: GRANT OF PATENT INTENDED

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Specialization

This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kailuweit & Uhlemann, Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG and 25 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 24.08.2012 - Priority Date (US 201261693032P)
  • 27.02.2014 - Publication A1 (WO2014031156)
  • 01.07.2015 - Publication A1 (EP2888755)

IPC Classification