Priority Date: 23.04.12 (US 201261636988P)

ELECTROSTATIC CLAMP, LITHOGRAPHIC APPARATUS AND METHOD

  • Application ID: EP13709941
  • Status: GRANT OF PATENT INTENDED

Applicant

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Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 23.04.2012 - Priority Date (US 201261636988P)
  • 31.10.2013 - Publication A2 (WO2013160026)
  • 04.03.2015 - Publication A2 (EP2841995)

IPC Classification