Priority Date: 09.03.12 (DE 201210203716)

ILLUMINATION OPTICS FOR EUV PROJECTION LITHOGRAPHY AND OPTICAL SYSTEM HAVING SUCH AN ILLUMINATION OPTICS

  • Application ID: EP13707849
  • Status: GRANT OF PATENT INTENDED

Applicant

Technology company logo small
Technology Company

Attorney

Employment test 11 - 50 employees
Company dna rau schneck and huebner
operating since 1878
Headquarter in Nuremberg, Berlin and 1 office
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Rau Schneck & Hübner PartGmbB is specialized in the combination G02 and G03. We found, that Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte, Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Plougmann & Vingtoft A/S, Bonsmann Bonsmann Frank and 9 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 09.03.2012 - Priority Date (DE 201210203716)
  • 12.09.2013 - Publication A1 (WO2013131834)
  • 14.01.2015 - Publication A1 (EP2823360)

IPC Classification