Priority Date: 07.03.12 (US 201261607745P)

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

  • Application ID: EP13704760
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Applicant

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Technology Company

Attorney

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Technology Company

Specialization

This patent has the IPC combination B01, B41, G03, and H05 is specialized in the combination B01, B41, G03, and H05. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 07.03.2012 - Priority Date (US 201261607745P)
  • 12.09.2013 - Publication A1 (WO2013131706)
  • 18.06.2014 - Publication A1 (EP2742387)
  • 01.04.2015 - Publication B1 (EP2742387)