Method for antireflective coating protection with organosilanes

  • Application ID: EP13198629
  • Status: GRANT OF PATENT INTENDED

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Specialization

This patent has the IPC combination B05, C03, C23, and G02 is specialized in the combination B05, C03, C23, and G02. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 24.06.2015 - Publication A1 (EP2886205)