Method of estimating an exposure tolerance and method of manufacturing a semiconductor device
- Application ID: EP13184534
- Status: █ GRANT OF PATENT INTENDED
This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 22.03.2013 - Priority Date (JP 20130061137)
- 24.09.2014 - Publication A1 (EP2781960)