Priority Date: 12.05.05 (JP 20050139344)

Projection optical system, exposure apparatus and exposure method

  • Application ID: EP13174486
  • Status: The patent has been granted


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Technology Company


Employment test 51 - 200 employees
Company dna hoffmann eitle
operating since 1892
Headquarter in Munich and 6 offices
active in Legal Services and IP Portfolio Processing


This EP application has the IPC class G02, G03, and H01. Hoffmann Eitle PartmbB is specialized in the combination G02, G03, and H01. We found, that Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Weser & Kollegen, Office Kirkpatrick S.A., Osha Liang SARL are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.


  • 12.05.2005 - Priority Date (JP 20050139344)
  • 06.11.2013 - Publication A2 (EP2660853)
  • 26.03.2014 - Publication A3 (EP2660853)
  • 05.07.2017 - Publication B1 (EP2660853)