Priority Date: 12.05.05 (JP 20050139344)

Projection optical system, exposure apparatus and exposure method

  • Application ID: EP13174486
  • Status: The patent has been granted

Applicant

Technology company logo small
Technology Company

Attorney

Employment test 51 - 200 employees
Company dna hoffmann eitle
operating since 1892
Headquarter in Munich and 6 offices
active in Legal Services and IP Portfolio Processing

Specialization

This EP application has the IPC combination G02, G03, and H01. Hoffmann Eitle PartmbB is specialized in the combination G02, G03, and H01. We found, that Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, TBK-Patent, Weser & Kollegen, Office Kirkpatrick S.A. and 1 other are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 12.05.2005 - Priority Date (JP 20050139344)
  • 06.11.2013 - Publication A2 (EP2660853)
  • 26.03.2014 - Publication A3 (EP2660853)
  • 05.07.2017 - Publication B1 (EP2660853)