Projection optical system, exposure apparatus and exposure method
- Application ID: EP13174486
- Status: █ The patent has been granted
This EP application has the IPC class G02, G03, and H01. Hoffmann Eitle PartmbB is specialized in the combination G02, G03, and H01. We found, that Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Weser & Kollegen, Office Kirkpatrick S.A., Osha Liang SARL are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.