Gas configuration for magnetron deposition systems

  • Application ID: EP13171157
  • Status: EXAMINATION REQUESTED

Applicant

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) DenK iP bvba is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 10.12.2014 - Publication A1 (EP2811508)

IPC Classification