Electronic configuration for magnetron sputter deposition systems

  • Application ID: EP13171156
  • Status: EXAMINATION REQUESTED

Applicant

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Specialization

This EP application has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). DenK iP bvba is specialized in the combination C23 and H01. We found, that Kailuweit & Uhlemann, Riechelmann & Carlsohn GbR, Patentanwälte Rauschenbach, Bird Goën & Co NV, Troesch Scheidegger Werner AG and 24 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 10.12.2014 - Publication A1 (EP2811509)

IPC Classification