Method for imaging a sample in a dual-beam charged particle apparatus

  • Application ID: EP13170553
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

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Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). FEI Company is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 10.12.2014 - Publication A1 (EP2811506)
  • 06.04.2016 - Publication B1 (EP2811506)

IPC Classification