Deformable optical system and method for controlling the same as well as a lithographic system comprising the deformable optical system
- Application ID: EP13167533
- Status: █ APPLICATION DEEMED TO BE WITHDRAWN
This EP application has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Oehmke & Kollegen, Hoffmann Eitle PartmbB, Ter Meer Steinmeister & Partner PartGmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Plougmann & Vingtoft A/S and 19 others are specialized in this combination either. For a similar patent, they might be a good choice.