Deformable optical system and method for controlling the same as well as a lithographic system comprising the deformable optical system

  • Application ID: EP13167533
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

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Specialization

This patent has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in the combination G02 and G03. We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Beckord & Niedlich, Bonsmann Bonsmann Frank and 11 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 19.11.2014 - Publication A1 (EP2804041)

IPC Classification