Deformable optical system and method for controlling the same as well as a lithographic system comprising the deformable optical system

  • Application ID: EP13167533
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

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Specialization

This EP application has the IPC class G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Bonsmann Bonsmann Frank, Zeuner Summerer Stütz and 11 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 19.11.2014 - Publication A1 (EP2804041)

IPC Classification