Deformable optical system and method for controlling the same as well as a lithographic system comprising the deformable optical system
- Application ID: EP13167533
- Status: █ APPLICATION DEEMED TO BE WITHDRAWN
This patent has the IPC combination G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in the combination G02 and G03. We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Beckord & Niedlich, Bonsmann Bonsmann Frank and 11 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.