Electron beam wafer inspection system and method for operation thereof

  • Application ID: EP13166694
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Attorney

Employment test 11 - 50 employees
Company dna zimmermann and partner
no operation time available
Headquarter in Munich and 2 offices
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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) Zimmermann & Partner Patentanwälte mbB is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 12.11.2014 - Publication A1 (EP2801997)
  • 09.03.2016 - Publication B1 (EP2801997)

IPC Classification