PROCESS AND METHOD FOR IN-SITU DRY CLEANING OF THIN FILM DEPOSITION REACTORS AND THIN FILM LAYERS

  • Application ID: EP12890153
  • Status: GRANT OF PATENT INTENDED

Attorney

operating since 1997
Headquarter in Munich
active in Legal Services

Specialization

This EP application has the IPC combination B08 (CLEANING) and C09 (DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR). There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 26.06.2014 - Publication A1 (WO2014094103)
  • 28.10.2015 - Publication A1 (EP2934775)

IPC Classification