PROCESS AND METHOD FOR IN-SITU DRY CLEANING OF THIN FILM DEPOSITION REACTORS AND THIN FILM LAYERS
- Application ID: EP12890153
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC combination B08 (CLEANING) and C09 (DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR). There is no patent agent firm in the market, which is specialized in this combination of IPC classes.