DRIVE METHOD FOR SPATIAL LIGHT MODULATOR, METHOD FOR GENERATING PATTERN FOR EXPOSURE, AND EXPOSURE METHOD AND DEVICE
- Application ID: EP12865561
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC combination G02, G03, and H01. Hoffmann Eitle PartmbB is specialized in the combination G02, G03, and H01. We found, that Viering, Jentschura & Partner mbB Patent- und Rechtsanwälte, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, TBK-Patent, Weser & Kollegen, Office Kirkpatrick S.A. and 1 other are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.