DRIVE METHOD FOR SPATIAL LIGHT MODULATOR, METHOD FOR GENERATING PATTERN FOR EXPOSURE, AND EXPOSURE METHOD AND DEVICE
- Application ID: EP12865561
- Status: █ GRANT OF PATENT INTENDED
This patent has the IPC combination G02, G03, and H01 Hoffmann Eitle PartmbB is specialized in the combination G02, G03, and H01. We found, that Bird Goën & Co NV, Becker Kurig Straus, Weser & Kollegen, Office Kirkpatrick S.A., Venner Shipley LLP and 2 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.