Priority Date: 28.12.11 (JP 20110288690)

VAPOR DEPOSITION APPARATUS HAVING PRETREATMENT DEVICE THAT USES PLASMA

  • Application ID: EP12861556
  • Status: GRANT OF PATENT INTENDED

Attorney

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Headquarter in Mannheim and 3 offices
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Specialization

This patent has the IPC combination B32, C23, and H05 is specialized in the combination B32, C23, and H05. We found, that Koepe & Partner Patentanwälte, Gille Habral, IPecunia Patents B.V. are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 28.12.2011 - Priority Date (JP 20110288690)
  • 04.07.2013 - Publication A1 (WO2013100073)
  • 05.11.2014 - Publication A1 (EP2799589)

IPC Classification