Priority Date: 22.11.11 (JP 20110254695)

PLASMA GENERATION SOURCE AND VACUUM PLASMA PROCESSING APPARATUS PROVIDED WITH SAME

  • Application ID: EP12851989
  • Status: EXAMINATION IN PROGRESS

Attorney

Employment test 51 - 200 employees
Company dna tbk patent
operating since 1972
1132.32
Headquarter in Munich
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC class C23, F25, H01, and H05. There is no patent agent firm in the market, which is specialized in this combination of IPC classes.

Timeline

  • 22.11.2011 - Priority Date (JP 20110254695)
  • 30.05.2013 - Publication A1 (WO2013076966)
  • 01.10.2014 - Publication A1 (EP2785152)