Priority Date: 21.11.11 (US 201161562166P)

ASSIST LAYERS FOR EUV LITHOGRAPHY

  • Application ID: EP12851678
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorney

Employment test 11 - 50 employees
Company dna uexkull and stolberg
operating since 1958
Headquarter in Hamburg and 1 office
active in Legal Services

Specialization

This patent has the IPC combination G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and H01 (BASIC ELECTRIC ELEMENTS) is specialized in the combination G03 and H01. We found, that Kuhnen & Wacker, Hoffmann Eitle PartmbB, Bird Goën & Co NV, Becker Kurig Straus, Beetz & Partner and 11 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 21.11.2011 - Priority Date (US 201161562166P)
  • 30.05.2013 - Publication A1 (WO2013078211)
  • 01.10.2014 - Publication A1 (EP2783389)

IPC Classification