Priority Date: 06.09.11 (US 201161531509P)

LINEAR STAGE FOR REFLECTIVE ELECTRON BEAM LITHOGRAPHY

  • Application ID: EP12829998
  • Status: GRANT OF PATENT INTENDED

Applicant

Technology company logo small
Technology Company

Attorney

operating since 1927
Headquarter in Dublin and 1 office
active in Legal Services

Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). F. R. Kelly & Co. is specialized in H01. F. R. Kelly & Co. is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 06.09.2011 - Priority Date (US 201161531509P)
  • 14.03.2013 - Publication A1 (WO2013036615)
  • 16.07.2014 - Publication A1 (EP2754173)

IPC Classification