LINEAR STAGE FOR REFLECTIVE ELECTRON BEAM LITHOGRAPHY
- Application ID: EP12829998
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). F. R. Kelly & Co. is specialized in H01. F. R. Kelly & Co. is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.
- 06.09.2011 - Priority Date (US 201161531509P)
- 14.03.2013 - Publication A1 (WO2013036615)
- 16.07.2014 - Publication A1 (EP2754173)