REACTIVE SPUTTERING PROCESS
- Application ID: EP12810067
- Status: █ The patent has been granted
This EP application has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). Kanzlei Kempkens is specialized in the combination C23 and H01. We found, that Kailuweit & Uhlemann, Patentanwälte Rauschenbach, ip21 Ltd, Troesch Scheidegger Werner AG, Berendt Leyh & Hering and 24 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.