Priority Date: 06.10.11 (FR 20110003032)

METHOD OF CONTROLLING AN ION IMPLANTER IN PLASMA IMMERSION MODE

  • Application ID: EP12794358
  • Status: EXAMINATION IN PROGRESS

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Specialization

This patent has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS) Renaud-Goud Conseil is specialized in the combination C23 and H01. We found, that Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG, adares Reininger & Partner and 23 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 06.10.2011 - Priority Date (FR 20110003032)
  • 25.04.2013 - Publication A1 (WO2013057390)
  • 13.08.2014 - Publication A1 (EP2764531)

IPC Classification