Priority Date: 04.10.11 (FR 20110003003)

CONTROL MODULE FOR AN ION IMPLANTER IN THE PLASMA IMMERSION MODE

  • Application ID: EP12794357
  • Status: GRANT OF PATENT INTENDED

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Specialization

This patent has the IPC combination C23, G01, and H01 is specialized in the combination C23, G01, and H01. We found, that Kailuweit & Uhlemann, Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG and 9 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 04.10.2011 - Priority Date (FR 20110003003)
  • 11.04.2013 - Publication A1 (WO2013050670)
  • 13.08.2014 - Publication A1 (EP2764530)

IPC Classification