CONTROL MODULE FOR AN ION IMPLANTER IN THE PLASMA IMMERSION MODE
- Application ID: EP12794357
- Status: █ GRANT OF PATENT INTENDED
This patent has the IPC combination C23, G01, and H01 is specialized in the combination C23, G01, and H01. We found, that Patentanwälte Rauschenbach, Patentanwaltskanzlei Dr. Steiniger, Bird Goën & Co NV, Troesch Scheidegger Werner AG, Cremer & Cremer and 8 others are specialized in all of these IPC classes. For a similar patent, they might be a good choice.