Priority Date: 15.09.11 (US 201161534943P)

METHOD FOR THE TEMPERATURE MEASUREMENT OF SUBSTRATES IN A VACUUM CHAMBER

  • Application ID: EP12756380
  • Status: GRANT OF PATENT INTENDED

Applicants

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Technology Company
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Technology Company

Attorney

operating since 2005
Headquarter in Landsberg
active in Legal Services

Specialization

This patent has the IPC class G01 (MEASURING; TESTING) is specialized in G01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 15.09.2011 - Priority Date (US 201161534943P)
  • 21.03.2013 - Publication A2 (WO2013037467)
  • 23.07.2014 - Publication A2 (EP2756276)

IPC Classification