Priority Date: 18.08.11 (US 201161525029P)

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

  • Application ID: EP12738445
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Applicant

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Technology Company

Attorney

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Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.08.2011 - Priority Date (US 201161525029P)
  • 21.02.2013 - Publication A1 (WO2013023876)
  • 25.06.2014 - Publication A1 (EP2745174)
  • 16.09.2015 - Publication B1 (EP2745174)

IPC Classification