Priority Date: 14.03.11 (US 201161452450P)

METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER

  • Application ID: EP12719486
  • Status: GRANT OF PATENT INTENDED

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Specialization

This patent has the IPC class H01 (BASIC ELECTRIC ELEMENTS) Lorenz & Kollegen PartGmbB is specialized in H01. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 14.03.2011 - Priority Date (US 201161452450P)
  • 20.09.2012 - Publication A2 (WO2012125560)
  • 22.01.2014 - Publication A2 (EP2686877)