Priority Date: 29.03.11 (US 201161468852P)

MEASUREMENT OF THE POSITION OF A RADIATION BEAM SPOT IN LITHOGRAPHY

  • Application ID: EP12708271
  • Status: GRANT OF PATENT INTENDED

Applicant

Technology company logo small
Technology Company

Attorney

no operation time available
2 offices
Technology Company

Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 29.03.2011 - Priority Date (US 201161468852P)
  • 04.10.2012 - Publication A1 (WO2012130532)
  • 05.02.2014 - Publication A1 (EP2691811)

IPC Classification