Priority Date: 20.10.11 (RU 20110142372)

Optical measurement system and method for measuring critical dimension of nanostructure

  • Application ID: EP12189262
  • Status: NO OPPOSITION FILED WITHIN TIMELIMIT

Applicant

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Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Elkington and Fife LLP is specialised in G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 20.10.2011 - Priority Date (RU 20110142372)
  • 01.05.2013 - Publication A2 (EP2587313)
  • 14.01.2015 - Publication A3 (EP2587313)
  • 11.05.2016 - Publication B1 (EP2587313)

IPC Classification