Priority Date: 21.09.11 (US 201161537098P)

Compositions and antireflective coatings for photolithography

  • Application ID: EP12184808
  • Status: PATENT GRANTED

Applicants

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Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Boult Wade Tennant Ltd is specialised in G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 21.09.2011 - Priority Date (US 201161537098P)
  • 29.05.2013 - Publication A2 (EP2597518)
  • 01.07.2015 - Publication A3 (EP2597518)
  • 07.12.2016 - Publication B1 (EP2597518)

IPC Classification