Priority Date: 18.08.11 (US 201161524960P)

Support table, lithographic apparatus and device manufacturing method

  • Application ID: EP12180596
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Applicant

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Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). ASML Netherlands B.V. is specialized in G03. ASML Netherlands B.V. is specialised in G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 18.08.2011 - Priority Date (US 201161524960P)
  • 20.02.2013 - Publication A1 (EP2560050)

IPC Classification