Priority Date: 23.08.11 (JP 20110181579)

Charged particle beam forming aperture and charged particle beam exposure apparatus

  • Application ID: EP12175854
  • Status: APPLICATION WITHDRAWN

Applicant

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Technology Company

Attorney

Employment test 51 - 200 employees
Company dna tbk patent
operating since 1972
1263.73
TBK
Headquarter in Munich
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC class G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Twelmeier Mommer & Partner, Patentanwalt Dipl.-Ing. Ralf Christian Bucher, Brevalex, HUASUN Patent- und Rechtsanwälte, Patentanwaltskanzlei Dr. Hans-Herbert Stoffregen and 3 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 23.08.2011 - Priority Date (JP 20110181579)
  • 27.02.2013 - Publication A2 (EP2562765)
  • 23.04.2014 - Publication A3 (EP2562765)

IPC Classification