Priority Date: 23.08.11 (JP 20110181579)

Charged particle beam forming aperture and charged particle beam exposure apparatus

  • Application ID: EP12175854
  • Status: APPLICATION WITHDRAWN

Applicant

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Technology Company

Attorney

Employment test 51 - 200 employees
Company dna tbk patent
operating since 1972
1303.74
Headquarter in Munich
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC combination G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Rösler Rasch van der Heide & Partner, Patentanwalt Dipl.-Ing. Ralf Christian Bucher, Brevalex, HUASUN Patent- und Rechtsanwälte, Patentanwaltskanzlei Dr. Hans-Herbert Stoffregen and 1 other are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 23.08.2011 - Priority Date (JP 20110181579)
  • 27.02.2013 - Publication A2 (EP2562765)
  • 23.04.2014 - Publication A3 (EP2562765)

IPC Classification