Charged particle beam forming aperture and charged particle beam exposure apparatus
- Application ID: EP12175854
- Status: █ APPLICATION WITHDRAWN
This EP application has the IPC class G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Diehl & Partner GbR, Twelmeier Mommer & Partner, Patentanwalt Dipl.-Ing. Ralf Christian Bucher, Brevalex, Patentanwaltskanzlei Dr. Hans-Herbert Stoffregen and 2 others are specialized in this combination either. For a similar patent, they might be a good choice.