Priority Date: 02.08.11 (US 201161514320P)

Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp

  • Application ID: EP12171001
  • Status: The application has been published

Attorneys

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Technology Company
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Technology Company

Specialization

This EP application has the IPC class H01 (BASIC ELECTRIC ELEMENTS). ASML Netherlands B.V., ASML Netherlands B.V. is specialised in H01 (BASIC ELECTRIC ELEMENTS). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 02.08.2011 - Priority Date (US 201161514320P)
  • 06.02.2013 - Publication A2 (EP2555234)
  • 14.06.2017 - Publication A3 (EP2555234)

IPC Classification