ANTENNA FOR PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING APPARATUS USING ANTENNA
- Application ID: EP11871785
- Status: █ APPLICATION WITHDRAWN
This EP application has the IPC combination C23, H01, and H05. We found, that Riechelmann & Carlsohn GbR, Koepe & Partner Patentanwälte, Cremer & Cremer, Atotech Deutschland GmbH, Yeadon IP Ltd and 2 others are specialized in this combination either. For a similar patent, they might be a good choice.