ANTENNA FOR PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING APPARATUS USING ANTENNA
- Application ID: EP11871785
- Status: █ APPLICATION WITHDRAWN
This EP application has the IPC class C23, H01, and H05. Patentanwalt Ulrich Hehl is specialized in the combination C23, H01, and H05. We found, that Koepe & Partner Patentanwälte, Cremer & Cremer, Atotech Deutschland GmbH, Yeadon IP Ltd, Chemetall GmbH and 1 other are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.