ANTENNA FOR PLASMA PROCESSING APPARATUS, AND PLASMA PROCESSING APPARATUS USING ANTENNA

  • Application ID: EP11871785
  • Status: APPLICATION WITHDRAWN

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Specialization

This EP application has the IPC class C23, H01, and H05. Patentanwalt Ulrich Hehl is specialized in the combination C23, H01, and H05. We found, that Koepe & Partner Patentanwälte, Cremer & Cremer, Atotech Deutschland GmbH, Yeadon IP Ltd, Chemetall GmbH and 1 other are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 07.03.2013 - Publication A1 (WO2013030953)
  • 09.07.2014 - Publication A1 (EP2753154)