Priority Date: 09.08.10 (JP 20100178742)

TANTALUM SPATTERING TARGET

  • Application ID: EP11816328
  • Status: GRANT OF PATENT INTENDED

Applicant

Attorney

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Specialization

This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL). Boehmert & Boehmert Anwaltspartnerschaft mbB is specialised in C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 09.08.2010 - Priority Date (JP 20100178742)
  • 16.02.2012 - Publication A1 (WO2012020662)
  • 19.06.2013 - Publication A1 (EP2604719)

IPC Classification