Priority Date: 27.12.10 (US 201061427320P)

LIQUID IMMERSION MEMBER, IMMERSION EXPOSURE APPARATUS, EXPOSING METHOD, DEVICE FABRICATING METHOD, PROGRAM, AND STORAGE MEDIUM

  • Application ID: EP11815875
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Applicant

Technology company logo small
Technology Company

Attorney

Employment test 51 - 200 employees
Company dna hoffmann eitle
operating since 1892
Headquarter in Munich and 6 offices
active in Legal Services and IP Portfolio Processing

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Hoffmann Eitle PartmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 27.12.2010 - Priority Date (US 201061427320P)
  • 05.07.2012 - Publication A1 (WO2012091163)
  • 06.11.2013 - Publication A1 (EP2659308)

IPC Classification