MASK AND SCANNING PROJECTION EXPOSURE METHOD FOR MICROLITHOGRAPHY

  • Application ID: EP11802444
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorney

Employment test 11 - 50 employees
Company dna ruff wilhelm beier dauster
operating since 2001
Headquarter in Stuttgart
active in Legal Services and IP Consulting

Specialization

This patent has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 04.07.2013 - Publication A1 (WO2013097897)
  • 05.11.2014 - Publication A1 (EP2798402)

IPC Classification