Priority Date: 04.03.11 (US 201161449381P)

LITHOGRAPIC APPARATUS, SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD

  • Application ID: EP11802413
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorneys

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2 offices
Technology Company
no operation time available
2 offices
Technology Company

Specialization

This patent has the IPC combination G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) is specialized in the combination G03 and G21. We found, that Bonsmann Bonsmann Frank, The European Union, represented by the European Commission are specialized in all of these IPC classes. For a similar patent, they might be a good choice.

Timeline

  • 04.03.2011 - Priority Date (US 201161449381P)
  • 13.09.2012 - Publication A1 (WO2012119672)
  • 08.01.2014 - Publication A1 (EP2681625)

IPC Classification