Priority Date: 04.03.11 (US 201161449381P)

LITHOGRAPIC APPARATUS, SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD

  • Application ID: EP11802413
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorneys

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2 offices
Technology Company
no operation time available
2 offices
Technology Company

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING). We found, that Bonsmann Bonsmann Frank, The European Union, represented by the European Commission are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 04.03.2011 - Priority Date (US 201161449381P)
  • 13.09.2012 - Publication A1 (WO2012119672)
  • 08.01.2014 - Publication A1 (EP2681625)

IPC Classification