LITHOGRAPIC APPARATUS, SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD
- Application ID: EP11802413
- Status: █ GRANT OF PATENT INTENDED
This patent has the IPC combination G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING) is specialized in the combination G03 and G21. We found, that Bonsmann Bonsmann Frank, The European Union, represented by the European Commission are specialized in all of these IPC classes. For a similar patent, they might be a good choice.