LITHOGRAPIC APPARATUS, SPECTRAL PURITY FILTER AND DEVICE MANUFACTURING METHOD
- Application ID: EP11802413
- Status: █ GRANT OF PATENT INTENDED
This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and G21 (NUCLEAR PHYSICS; NUCLEAR ENGINEERING). We found, that Bonsmann Bonsmann Frank, The European Union, represented by the European Commission are specialized in this combination either. For a similar patent, they might be a good choice.