Priority Date: 25.06.10 (JP 20100144847)

SPUTTERING DEVICE, DEPOSITION METHOD AND CONTROL DEVICE

  • Application ID: EP11797923
  • Status: GRANT OF PATENT INTENDED

Applicant

Technology company logo small
Technology Company

Attorneys

operating since 1937
1258.92
10 offices
active in Legal Services and IP Consulting
operating since 1937
1258.92
10 offices
active in Legal Services and IP Consulting
operating since 1937
1258.92
10 offices
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC combination C23, G11, and H01. We found, that Patentanwälte Gierlich & Pischitzis Partnerschaft is specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 25.06.2010 - Priority Date (JP 20100144847)
  • 29.12.2011 - Publication A1 (WO2011162036)
  • 01.05.2013 - Publication A1 (EP2586889)

IPC Classification