Priority Date: 25.03.10 (US 20100317689P)

DIFFRACTION BASED OVERLAY LINEARITY TESTING

  • Application ID: EP11760048
  • Status: EXAMINATION REQUESTED

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Specialization

This EP application has the IPC class G01 (MEASURING; TESTING). WP Thompson is specialised in G01 (MEASURING; TESTING). Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 25.03.2010 - Priority Date (US 20100317689P)
  • 29.09.2011 - Publication A1 (WO2011119577)
  • 30.01.2013 - Publication A1 (EP2550504)

IPC Classification