Priority Date: 15.03.10 (JP 20100058023)

SEMICONDUCTOR THIN-FILM MANUFACTURING METHOD, SEMINCONDUCTOR THIN-FILM MANUFACTURING APPARATUS, SUSCEPTOR, AND SUSCEPTOR HOLDING TOOL

  • Application ID: EP11756047
  • Status: APPLICATION DEEMED TO BE WITHDRAWN

Applicant

Attorney

Employment test 201 - 500 employees
Company dna grunecker kinkeldey stockmair and schwanhausser
operating since 1924
Headquarter in Munich and 2 offices
active in Legal Services

Specialization

This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kailuweit & Uhlemann, Riechelmann & Carlsohn GbR, Bird Goën & Co NV, Troesch Scheidegger Werner AG, adares Reininger & Partner and 26 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 15.03.2010 - Priority Date (JP 20100058023)
  • 22.09.2011 - Publication A1 (WO2011114858)
  • 23.01.2013 - Publication A1 (EP2549522)