Priority Date: 15.06.10 (US 20100354772P)

ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY AND PROJECTION EXPOSURE SYSTEM WITH AN ILLUMINATION OPTICAL SYSTEM OF THIS TYPE

  • Application ID: EP11723967
  • Status: EXAMINATION REQUESTED

Applicant

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Technology Company

Attorney

Employment test 11 - 50 employees
Company dna rau schneck and huebner
operating since 1878
Headquarter in Nuremberg, Berlin and 1 office
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Rau Schneck & Hübner PartGmbB is specialized in G03. Here you find a list of all patent agent firms which are specialized in this IPC class. For a similar patent, they might be a good choice.

Timeline

  • 15.06.2010 - Priority Date (US 20100354772P)
  • 22.12.2011 - Publication A2 (WO2011157601)
  • 24.04.2013 - Publication A2 (EP2583141)

IPC Classification