Method and device for producing low-particle layers on substrates
- Application ID: EP11174871
- Status: █ APPLICATION DEEMED TO BE WITHDRAWN
This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kailuweit & Uhlemann, Riechelmann & Carlsohn GbR, Bird Goën & Co NV, Troesch Scheidegger Werner AG, adares Reininger & Partner and 26 others are specialized in this combination either. For a similar patent, they might be a good choice.