IMAGING OPTICAL SYSTEM AND PROJECTION EXPOSURE INSTALLATION FOR MICROLITHOGRAPHY WITH AN IMAGING OPTICAL SYSTEM OF THIS TYPE

  • Application ID: EP10740596
  • Status: GRANT OF PATENT INTENDED

Applicant

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Technology Company

Attorney

Employment test 11 - 50 employees
Company dna rau schneck and huebner
operating since 1878
Headquarter in Nuremberg, Berlin and 1 office
active in Legal Services and IP Consulting

Specialization

This EP application has the IPC class G02 (OPTICS) and G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY). Rau Schneck & Hübner PartGmbB is specialized in the combination G02 and G03. We found, that Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Plougmann & Vingtoft A/S, Beckord & Niedlich, Bonsmann Bonsmann Frank and 8 others are specialized in all of these IPC classes as well. For a similar patent, they might be a good choice.

Timeline

  • 02.02.2012 - Publication A1 (WO2012013241)
  • 05.06.2013 - Publication A1 (EP2598931)

IPC Classification