Priority Date: 07.01.09 (US 20090143013P)

SPIN-ON SPACER MATERIALS FOR DOUBLE- AND TRIPLE-PATTERNING LITHOGRAPHY

  • Application ID: EP10729436
  • Status: The application is deemed to be withdrawn

Applicant

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Technology Company

Attorney

operating since 1958
Headquarter in Hamburg and 1 office
active in Legal Services

Specialization

This EP application has the IPC class G03 (PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY) and H01 (BASIC ELECTRIC ELEMENTS). We found, that Kuhnen & Wacker, Hoffmann Eitle PartmbB, Klunker Schmitt-Nilson Hirsch Patentanwälte (KSNH) Klunker IP Patentanwälte PartG mbB, Bird Goën & Co NV, Becker Kurig Straus and 6 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 07.01.2009 - Priority Date (US 20090143013P)
  • 15.07.2010 - Publication A2 (WO2010080789)
  • 12.10.2011 - Publication A2 (EP2374145)

IPC Classification