Method for forming a capacitor having a strontium/barium titanium oxide dielectric layer by means of ALD and memory device comprising such a capacitor
- Application ID: EP09075435
- Status: █ Examination is in progress
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This EP application has the IPC class C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and H01 (BASIC ELECTRIC ELEMENTS). There is no patent agent firm in the market, which is specialized in this combination of IPC classes.