Priority Date: 30.11.07 (US 20070004784P)

DENSE HOMOGENEOUS FLUORIDE FILMS FOR DUV ELEMENTS AND METHOD OF PREPARING SAME

  • Application ID: EP08854604
  • Status: The patent has been granted

Applicant

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Technology Company

Attorney

operating since 1951
Headquarter in Munich and 2 offices
active in Legal Services, IP Consulting, and IP-related Communication Service

Specialization

This EP application has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and G02 (OPTICS). We found, that Riechelmann & Carlsohn GbR, Gille Hrabal, Rieder & Partner, Foral Patent Law Offices, Patronus IP Ganahl Naefe GbR and 3 others are specialized in this combination either. For a similar patent, they might be a good choice.

Timeline

  • 30.11.2007 - Priority Date (US 20070004784P)
  • 04.06.2009 - Publication A1 (WO2009070227)
  • 11.08.2010 - Publication A1 (EP2215502)
  • 25.10.2017 - Publication B1 (EP2215502)