DENSE HOMOGENEOUS FLUORIDE FILMS FOR DUV ELEMENTS AND METHOD OF PREPARING SAME
- Application ID: EP08854604
- Status: █ The patent has been granted
This EP application has the IPC combination C23 (COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL) and G02 (OPTICS). We found, that Riechelmann & Carlsohn GbR, Gille Hrabal, Rieder & Partner, Foral Patent Law Offices, Patronus IP Ganahl Naefe GbR and 3 others are specialized in this combination either. For a similar patent, they might be a good choice.